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"Effect of annealing treatment and nanomechanical properties for multilayer ..."

Bo-Ching He et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.02.013

access: closed

type: Journal Article

metadata version: 2020-02-22

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Bo-Ching He, Hua-Chiang Wen, Meng-Hung Lin, Yi-Shao Lai, Wen-Fa Wu, Chang-Pin Chou:
Effect of annealing treatment and nanomechanical properties for multilayer Si_0.8Ge_0.2-Si films. Microelectron. Reliab. 50(6): 851-856 (2010)

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