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"Reservoir effect in SiCN capped copper/SiO₂ interconnects."

Valerie Girault, F. Terrier, D. Ney (2008)

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DOI: 10.1016/J.MICROREL.2007.05.007

access: closed

type: Journal Article

metadata version: 2021-11-16

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Valerie Girault, F. Terrier, D. Ney:
Reservoir effect in SiCN capped copper/SiO₂ interconnects. Microelectron. Reliab. 48(2): 219-224 (2008)

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