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"Plasma FIB: Enlarge your field of view and your field of applications."

Audrey Garnier et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.07.016

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/GarnierFHH15
Audrey Garnier, Giuseppe Filoni, Tomas Hrncír, Lukas Hladík:
Plasma FIB: Enlarge your field of view and your field of applications. Microelectron. Reliab. 55(9-10): 2135-2141 (2015)

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