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"Charging of radiation induced defects in RF MEMS dielectric films."

M. A. Exarchos et al. (2006)

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DOI: 10.1016/J.MICROREL.2006.07.045

access: closed

type: Journal Article

metadata version: 2022-10-02

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M. A. Exarchos, E. Papandreou, Patrick Pons, Mohamed Lamhamdi, George J. Papaioannou, Robert Plana:
Charging of radiation induced defects in RF MEMS dielectric films. Microelectron. Reliab. 46(9-11): 1695-1699 (2006)

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