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"Electrical analysis on implantation-related defect by nanoprobing methodology."

Changqing Chen et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.091

access: closed

type: Journal Article

metadata version: 2021-06-10

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  - https://dblp.org/rec/journals/mr/ChenNAaRMNLM16
Changqing Chen, P. T. Ng, Ghinboon Ang, H. Tan, Francis Rivai, Y. Z. Ma, Huipeng Ng, Jeffrey Lam, Zhihong Mai:
Electrical analysis on implantation-related defect by nanoprobing methodology. Microelectron. Reliab. 64: 317-320 (2016)

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