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"Determination of the thermal conductivity of composite low-k dielectrics ..."

Fen Chen et al. (2006)

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DOI: 10.1016/j.microrel.2005.05.016

access: closed

type: Journal Article

metadata version: 2020-02-22

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Fen Chen, J. Gill, Dave Harmon, T. Sullivan, A. Strong, B. Li, H. Rathore, Daniel C. Edelstein:
Determination of the thermal conductivity of composite low-k dielectrics for advanced interconnect structures. Microelectron. Reliab. 46(2-4): 232-243 (2006)

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