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"Extracting the relative dielectric constant for "high-kappa layers" from ..."

Octavian Buiu et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.006

access: closed

type: Journal Article

metadata version: 2024-06-17

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Octavian Buiu, Steve Hall, Olof Engström, B. Raeissi, Max Christian Lemme, Paul K. Hurley, Karim Cherkaoui:
Extracting the relative dielectric constant for "high-kappa layers" from CV measurements - Errors and error propagation. Microelectron. Reliab. 47(4-5): 678-681 (2007)

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