"Photon emission as a characterization tool for bipolar parasitics in ..."

Anne Beyreuther et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.07.091

access: closed

type: Journal Article

metadata version: 2021-10-14

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Anne Beyreuther, Norbert Herfurth, Elham Amini, Tomonori Nakamura, Ingrid De Wolf, Christian Boit:
Photon emission as a characterization tool for bipolar parasitics in FinFET technology. Microelectron. Reliab. 88-90: 273-276 (2018)

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