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"Kelvin probe microscopy for reliability investigation of RF-MEMS ..."

A. Belarni et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.07.046

access: closed

type: Journal Article

metadata version: 2023-12-07

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A. Belarni, Mohamed Lamhamdi, Patrick Pons, Laurent Boudou, Jean Guastavino, Y. Segui, George J. Papaioannou, Robert Plana:
Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches. Microelectron. Reliab. 48(8-9): 1232-1236 (2008)

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