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"Study of reactive ion etching process to fabricate the PMMA-based polymer ..."

Y. Zhao et al. (2004)

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DOI: 10.1016/J.MEJO.2004.02.005

access: closed

type: Journal Article

metadata version: 2020-03-09

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  - https://dblp.org/rec/journals/mj/ZhaoWCZZZLY04
Y. Zhao, F. Wang, Z. C. Cui, J. Zheng, H. M. Zhang, Daming Zhang, S. Y. Liu, Maobin Yi:
Study of reactive ion etching process to fabricate the PMMA-based polymer waveguide. Microelectron. J. 35(7): 605-608 (2004)

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