"Fabrication of silicon field-emission arrays using masks of amorphous ..."

D. F. Takeuti et al. (2007)

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DOI: 10.1016/J.MEJO.2006.10.003

access: closed

type: Journal Article

metadata version: 2023-09-11

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D. F. Takeuti, M. N. Tirolli, C. L. Danieli, Marco Antonio Robert Alves, Edmundo S. Braga, P. H. L. de Faria:
Fabrication of silicon field-emission arrays using masks of amorphous hydrogenated carbon films. Microelectron. J. 38(1): 31-34 (2007)

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