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"Self-aligned vertical double-gate MOSFET (VDGM) with the oblique rotating ..."
Ismail Saad, Razali Ismail (2008)
- Ismail Saad, Razali Ismail
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Self-aligned vertical double-gate MOSFET (VDGM) with the oblique rotating ion implantation (ORI) method. Microelectron. J. 39(12): 1538-1541 (2008)
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