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"Low temperature SnO₂ films deposited by APCVD."

Crisóforo Morales et al. (2008)

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DOI: 10.1016/J.MEJO.2007.07.101

access: closed

type: Journal Article

metadata version: 2023-10-26

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Crisóforo Morales, Héctor Juárez, Tomás Díaz, Yasuhiro Matsumoto, Enrique Rosendo, Godofredo Garcia, M. Rubin, F. Mora, Mauricio Pacio, A. García:
Low temperature SnO₂ films deposited by APCVD. Microelectron. J. 39(3-4): 586-588 (2008)

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