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"Fabrication of arrays of line with nanoscale width and large length by ..."

Shi-Long Lv, Zhi-Tang Song, Song-Lin Feng (2008)

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DOI: 10.1016/J.MEJO.2008.01.080

access: closed

type: Journal Article

metadata version: 2020-02-22

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Shi-Long Lv, Zhi-Tang Song, Song-Lin Feng:
Fabrication of arrays of line with nanoscale width and large length by electron beam lithography with high-precision stage. Microelectron. J. 39(9): 1126-1129 (2008)

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