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"The influence of nitrogen and fluorine on the dielectric constant of ..."
M. Guerino, Marcos Massi, Ronaldo Domingues Mansano (2007)
- M. Guerino, Marcos Massi, Ronaldo Domingues Mansano:
The influence of nitrogen and fluorine on the dielectric constant of hydrogenated amorphous carbon (a-C: H) films. Microelectron. J. 38(8-9): 915-918 (2007)
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