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"Manufacturing and full characterization of silicon carbide-based ..."

Gemma Gabriel et al. (2007)

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DOI: 10.1016/J.MEJO.2006.11.008

access: closed

type: Journal Article

metadata version: 2021-10-14

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  - https://dblp.org/rec/journals/mj/GabrielECGRVG07
Gemma Gabriel, Ivan Erill, Jaume Caro, Rodrigo Gómez, Dolors Riera, Rosa Villa, Philippe Godignon:
Manufacturing and full characterization of silicon carbide-based multi-sensor micro-probes for biomedical applications. Microelectron. J. 38(3): 406-415 (2007)

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