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"Surface micromachined RF MEMS variable capacitor."

Dong-Ming Fang et al. (2007)

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DOI: 10.1016/J.MEJO.2007.07.079

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mj/FangFCZZ07
Dong-Ming Fang, Shi Fu, Ying Cao, Yong Zhou, Xiao-Lin Zhao:
Surface micromachined RF MEMS variable capacitor. Microelectron. J. 38(8-9): 855-859 (2007)

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