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"Characteristics of a micromachined piezovalve combined with a multilayer ..."

Gwiy-Sang Chung, Ki-Bong Han (2007)

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DOI: 10.1016/J.MEJO.2007.05.009

access: closed

type: Journal Article

metadata version: 2020-02-22

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Gwiy-Sang Chung, Ki-Bong Han:
Characteristics of a micromachined piezovalve combined with a multilayer ceramic actuator. Microelectron. J. 38(6-7): 690-694 (2007)

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