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"Characteristics of SiCN microstructures for harsh environment and ..."

Gwiy-Sang Chung (2007)

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DOI: 10.1016/J.MEJO.2007.07.078

access: closed

type: Journal Article

metadata version: 2020-02-22

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Gwiy-Sang Chung:
Characteristics of SiCN microstructures for harsh environment and high-power MEMS applications. Microelectron. J. 38(8-9): 888-893 (2007)

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