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"Smooth indium zinc oxide film prepared by sputtering a ..."

Shang-Chou Chang, Ming-Hua Shiao (2007)

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DOI: 10.1016/J.MEJO.2007.09.014

access: closed

type: Journal Article

metadata version: 2020-02-22

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Shang-Chou Chang, Ming-Hua Shiao:
Smooth indium zinc oxide film prepared by sputtering a In₂O₃: ZnO=95: 5 target. Microelectron. J. 38(12): 1202-1206 (2007)

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