Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Advanced manufacturing equipment: a vertical batch furnace for 300-mm ..."

Albert Hasper et al. (1999)

> Home

Details and statistics

DOI: 10.1109/40.798107

access: closed

type: Journal Article

metadata version: 2017-05-20

- view
  authority control:
- export record
  dblp key:
  - journals/micro/HasperOHC99
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/micro/HasperOHC99
Albert Hasper, Ed Oosterlaken, Frank Huussen, Tanja Claasen-Vujcic:
Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing. IEEE Micro 19(5): 34-43 (1999)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.