"Micro-object Pick and Place Operation under SEM based on Micro-physics."

Shigeki Saito, Hideki Miyazaki, Tomomasa Sato (2002)

Details and statistics

DOI: 10.20965/JRM.2002.P0227

access: closed

type: Journal Article

metadata version: 2020-04-01

a service of  Schloss Dagstuhl - Leibniz Center for Informatics