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"Multilayer stacking technology using wafer-to-wafer stacked method."

Nobuaki Miyakawa et al. (2008)

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DOI: 10.1145/1412587.1412593

access: closed

type: Journal Article

metadata version: 2020-06-08

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  - journals/jetc/MiyakawaHMNSNT08
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  - https://dblp.org/rec/journals/jetc/MiyakawaHMNSNT08
Nobuaki Miyakawa, Eiri Hashimoto, Takanori Maebashi, Natsuo Nakamura, Yutaka Sacho, Shigeto Nakayama, Shinjiro Toyoda:
Multilayer stacking technology using wafer-to-wafer stacked method. ACM J. Emerg. Technol. Comput. Syst. 4(4): 20:1-20:15 (2008)

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