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"Fabrication Of Ultrahigh-Density Nano-Pyramid Arrays (Npas) On (100) ..."
Jeng T. Sheu et al. (2003)
- Jeng T. Sheu, Cheng C. Chen, Sun P. Yeh, Hseih T. Chou:
Fabrication Of Ultrahigh-Density Nano-Pyramid Arrays (Npas) On (100) Silicon Wafer Using Scanning Probe Lithography And Anisotropic Wet Etching. Int. J. Comput. Eng. Sci. 4(3): 695-698 (2003)
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