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"Design And Fabrication Of SIO2 Micromechanical Structures ..."
Prem Pal, Suneet Tuli, Sudhir Chandra (2003)
- Prem Pal, Suneet Tuli, Sudhir Chandra:
Design And Fabrication Of SIO2 Micromechanical Structures Inside Anisotropically Etched Cavity. Int. J. Comput. Eng. Sci. 4(3): 489-492 (2003)
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