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"Application Of Micro Hot Embossing For MEMS Structures."
Y. Murakoshi, Xuechuan Shan, Ryutaro Maeda (2003)
- Y. Murakoshi, Xuechuan Shan, Ryutaro Maeda:
Application Of Micro Hot Embossing For MEMS Structures. Int. J. Comput. Eng. Sci. 4(3): 617-620 (2003)
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