"A Digital/Analog Electrostatic Actuating Mechanism For Optical Applications."

Y. C. Lin, J. C. Chiou, C. L. Chen (2003)

Details and statistics

DOI: 10.1142/S1465876303001460

access: closed

type: Journal Article

metadata version: 2020-07-09

a service of  Schloss Dagstuhl - Leibniz Center for Informatics