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"Fabrication Process Of A Capacitive Microphone With p++ Diaphragm And ..."
Ciprian Iliescu et al. (2003)
- Ciprian Iliescu, Tietun Sun, Jianmin Miao, Francis Eng Hock Tay:
Fabrication Process Of A Capacitive Microphone With p++ Diaphragm And Silicon Bonded Top-Plate. Int. J. Comput. Eng. Sci. 4(3): 687-690 (2003)
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