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"A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical ..."
Dongil Cho et al. (2003)
- Dongil Cho
, Hyoungho Ko, Jongpal Kim, Sangjun Park, Donghun Kwak, Taeyong Song, William Carr, James Bus:
A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process. Int. J. Comput. Eng. Sci. 4(3): 493-496 (2003)
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