"Patterned Sapphire Substrates for III-Nitride Epitaxial Growth."

Natsuko Omiya et al. (2018)

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DOI: 10.20965/IJAT.2018.P0179

access: closed

type: Journal Article

metadata version: 2023-09-30

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Natsuko Omiya, Hideo Aida, Yutaka Kimura, Yuki Kawamata, Seong-Woo Kim, Michio Uneda:
Patterned Sapphire Substrates for III-Nitride Epitaxial Growth. Int. J. Autom. Technol. 12(2): 179-186 (2018)

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