"Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate."

Koji Koyama et al. (2014)

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DOI: 10.20965/IJAT.2014.P0121

access: closed

type: Journal Article

metadata version: 2023-09-30

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Koji Koyama, Hideo Aida, Michio Uneda, Hidetoshi Takeda, Seong-Woo Kim, Hiroki Takei, Tsutomu Yamazaki, Toshiro Doi:
Effects of N-Face Finishing on Geometry of Double-Side Polished GaN Substrate. Int. J. Autom. Technol. 8(1): 121-127 (2014)

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