"Resist Profile Control in E-Beam Lithography."

Sherri J. Gillespie (1984)

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DOI: 10.1147/RD.284.0454

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type: Journal Article

metadata version: 2020-03-13

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Sherri J. Gillespie:
Resist Profile Control in E-Beam Lithography. IBM J. Res. Dev. 28(4): 454-460 (1984)

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