"Fast image processing for optical metrology utilizing heterogeneous ..."

Marc Reichenbach et al. (2014)

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DOI: 10.1016/J.COMPELECENG.2013.09.008

access: open

type: Journal Article

metadata version: 2020-10-26

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Marc Reichenbach, Ralf Seidler, Benjamin Pfundt, Dietmar Fey:
Fast image processing for optical metrology utilizing heterogeneous computer architectures. Comput. Electr. Eng. 40(4): 1158-1170 (2014)

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