"Scanning Microwave Microscopy for Electronic Device Analysis on Nanometre ..."

Sören Hommel et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.134

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type: Journal Article

metadata version: 2022-03-23

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Sören Hommel, Nicole Killat, Andreas Altes, Thomas Schweinböck, Doris Schmitt-Landsiedel, Marco Silvestri, Oliver Haeberlen:
Scanning Microwave Microscopy for Electronic Device Analysis on Nanometre Scale. Microelectron. Reliab. 64: 310-312 (2016)

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