"Evaluation of Device Parameters of HfO2/SiO2/Si Gate Dielectric Stack for ..."

A. Madan et al. (2005)

Details and statistics

DOI: 10.1109/ICVD.2005.94

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

a service of  Schloss Dagstuhl - Leibniz Center for Informatics