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"Mean cycle time optimization in semiconductor tool sets via PM planning ..."

James R. Morrison, Hungil Kim, Adar A. Kalir (2014)

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DOI: 10.1109/WSC.2014.7020090

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

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  dblp key:
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  - https://dblp.org/rec/conf/wsc/MorrisonKK14
James R. Morrison, Hungil Kim, Adar A. Kalir:
Mean cycle time optimization in semiconductor tool sets via PM planning with different cycles: a G/G/m queueing and nonlinear programming approach. WSC 2014: 2466-2477

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