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"Integration of a Stacked Contact MOL for Monolithic CFET."

Victor Vega-Gonzalez et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185260

access: closed

type: Conference or Workshop Paper

metadata version: 2024-08-07

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Victor Vega-Gonzalez, D. Radisic, Bt Chan, S. Choudhury, S. Wang, A. Mingardi, Q. Toan Le, H. Decoster, Yusuke Oniki, P. Puttarame, Kevin Vandersmissen, J. P. Soulie, A. Peter, A. Sepulveda, D. Batuk, G. T. Martinez, Olivier Richard, Jürgen Bömmels, S. Biesemans, E. Dentoni Litta, Naoto Horiguchi, Seongho Park, Zsolt Tokei:
Integration of a Stacked Contact MOL for Monolithic CFET. VLSI Technology and Circuits 2023: 1-2

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