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"First demonstration of Two Metal Level Semi-damascene Interconnects with ..."

Gayle Murdoch et al. (2022)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830150

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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  dblp key:
  - conf/vlsit/MurdochOMPTDKOT22
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  - https://dblp.org/rec/conf/vlsit/MurdochOMPTDKOT22
Gayle Murdoch, Matin O'Toole, Giulio Marti, Ankit Pokhrel, Diana Tsvetanova, Stefan Decoster, Shreya Kundu, Yusuke Oniki, Arame Thiam, Quoc Toan Le, Olalla Varela Pedreira, Alicja Lesniewska, Gerardo Martinez-Alanis, Seongho Park, Zsolt Tokei:
First demonstration of Two Metal Level Semi-damascene Interconnects with Fully Self-aligned Vias at 18MP. VLSI Technology and Circuits 2022: 1-2

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