"Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s ..."

Martin van den Brink et al. (2022)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830360

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type: Conference or Workshop Paper

metadata version: 2022-08-04

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Martin van den Brink, Anthony Yen, Paul van Wijnen, Michael Lercel, Boudewijn Sluijk:
Holistic Patterning to Advance Semiconductor Manufacturing in the 2020s and Beyond. VLSI Technology and Circuits 2022: 3-7

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