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"Molybdenum Nitride as a Scalable and Thermally Stable pWFM for CFET."

Hiroaki Arimura et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185430

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-28

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  - conf/vlsit/ArimuraBFOVCCKS23
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  - https://dblp.org/rec/conf/vlsit/ArimuraBFOVCCKS23
Hiroaki Arimura, S. Brus, Jacopo Franco, Y. Oniki, A. Vandooren, T. Conard, B. T. Chan, B. Kannan, M. Samiee, W. Li, P. Deminskyi, E. Shero, J. Bakke, N. Jourdan, G. Alessio Verni, J. W. Maes, M. Givens, Lars-Åke Ragnarsson, Jérôme Mitard, E. Dentoni Litta, N. Horiguchi:
Molybdenum Nitride as a Scalable and Thermally Stable pWFM for CFET. VLSI Technology and Circuits 2023: 1-2

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