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"Electrical Modeling of Lithographic Imperfections."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Tuck-Boon Chan, Rani S. Ghaida, Puneet Gupta (2010)

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DOI: 10.1109/VLSI.DESIGN.2010.24

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Tuck-Boon Chan, Rani S. Ghaida, Puneet Gupta:
Electrical Modeling of Lithographic Imperfections. VLSI Design 2010: 423-428

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last updated on 2023-03-24 00:04 CET by the dblp team

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