"Triangle-based process hotspot classification with dummification in EUVL."

Po-Hsun Wu et al. (2014)

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DOI: 10.1109/VLSI-DAT.2014.6834860

access: closed

type: Conference or Workshop Paper

metadata version: 2019-09-25

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Po-Hsun Wu, Che-Wen Chen, Chi-Ruo Wu, Tsung-Yi Ho:
Triangle-based process hotspot classification with dummification in EUVL. VLSI-DAT 2014: 1-4

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