"Feeding of microparts along an asymmetric surface using horizontal and ..."

Atsushi Mitani, Yasutaka Matsuo (2011)

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DOI: 10.1109/ROBIO.2011.6181384

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Atsushi Mitani, Yasutaka Matsuo:
Feeding of microparts along an asymmetric surface using horizontal and symmetric vibrations - Development of asymmetric surfaces using anisotropic etching process of single-crystal silicon. ROBIO 2011: 795-800

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