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"Development of an Annular-Shaped Bernoulli Gripper for Contactless ..."

Shihang Wang et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451393

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Shihang Wang, Yancheng Wang, Deqing Mei, Songqiao Dai:
Development of an Annular-Shaped Bernoulli Gripper for Contactless Gripping of Large-Size Silicon Wafer. NEMS 2021: 1871-1876

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