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ORCID16th NEMS 2021: Xiamen, China
- 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. IEEE 2021, ISBN 978-1-6654-1941-3
- Yuxin Ye
, Nan Zhang, Lihang Yu, Bo Cong, Ruiwen Liu, Yanmei Kong, Binbin Jiao:
Integrated Electrical Test Vehicle Co-designed with Microfluidics for Evaluating the Performance of Embedded Cooling. 21-25 - Hangxu Ren, Xiyu Mao, Shanshan Zhang, Yu Cai, Shiyi Xu, Lu Fang, Xuesong Ye, Bo Liang:
Minimal-Invasive Levodopa Sensing Based on Differential Amperometry Microneedle Electrodes Decorated with Spike-like Au Nanoparticles. 26-29 - Xingqi Liu, Hongpeng Zhang, Zhiping Huang, Xuanlin Yang, Shixing Chen, Yuelin Wang, Tie Li, Zhenxing Cheng:
Silicon Nanowire Array Sensor for Highly Sensitive and Selective Detection of Nerve Agent Simulant Vapor via Surface Hydroxyl Groups. 30-33 - Gaopeng Xue, Masaya Toda, Xinghui Li, Takahito Ono:
Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk. 43-46 - Chenying Wang, Jiangtao Pu, Lei Li, Weixuan Jing, Yijun Zhang, Yaxin Zhang, Feng Han, Ming Liu, Wei Ren, Zhuangde Jiang:
Effect of the Different Substrates and the Film Thickness on the Surface Roughness of Step Structure. 47-50 - Yunqian He, Yuelin Wang, Tie Li:
Efficient Infrared-Thermal-Electric Conversion with Textured Dielectric Film. 51-54 - Jianguo Feng, Qi Wang, Yuanming Ma, Honglong Chang, Gaobin Xu:
Inertial Focusing Chip Based on Superposed Secondary Flows. 55-59 - Cheng Hou, Jiangjun Geng, Yuyang Sun, Tao Chen, Fengxia Wang, Hongling Ren, Xiuli Zuo, Yanqing Li, Huicong Liu, Lining Sun:
A Sensorised Forcep Based on Piezoresistive Force Sensor for Robotic-assisted Minimally Invasive Surgery. 60-63 - Hongjie Jiang, Manuel Ochoa:
In situ Laser-assisted Micrnmachining of Environmentally-responsive Hydrogel Films. 64-67 - Tao Deng, Zhaohao Zhang, Yang Zhang, Yuning Li, Zewen Liu:
Three-dimensional Graphene FETs for pH Detection. 68-72 - Hao Peng, Guoyi Kang, Jiaxin Jiang, Zungui Shao, Juan Liu, Yifang Liu, Gaofeng Zheng:
Synchronized Surface Modification of TiO2 Composite Nanofiber Through Core-Shell Electrospinning. 140-143 - Wenxin Liu, Hao Dong, Di Wang, Xing Chen:
Precursor-Based ZnO Nano Inks for Printed Electronics. 144-147 - Zehua Xiang, Hao-Bin Wang, Hang Guo, Ji Wan, Chen Xu, Li-Ming Miao, Mengdi Han, Haixia Zhang:
Efficient Manufacturing of Microdome Array for Advanced Electronic and Optical Devices†. 148-151 - Xin Chen, Daqiao Tong, Jian Zhang, Lingxiao Gao, Fayang Wang, Hongzhi Pan, Liang Cao, Xiaojing Mu:
Broadband Piezoelectric Harvester Utilizing Three-wafer Bonding for Self-powered Wireless Sensor System. 158-161 - Hao Hong, Li Ye, Ke Li, Pasqualina M. Sarro, Guoqi Zhang, Zewen Liu:
Fabrication of Nanoslits with Etching TSWE Method. 174-177 - Xin Zhu, Chaoming Gu, Xiaojie Li, Zhi Ye, Zhen Cao, Yang Liu:
Characterization of ITO-SiNx Nanopores for Single-Biomolecular Sensing. 180-183 - Junlong Huang, Chen Bao, Anxin Luo, Fei Wang:
Mechanical Energy Harvester for Smart Shared Bicycle Application. 184-188 - Chao Cheng, Yadong Li, Yulan Lu, Chao Xiang, Jian Chen, Junbo Wang, Deyong Chen:
A Resonant Differential Pressure Sensor Based on Bulk Silicon Technology. 193-196 - Hua Chen, Zhen Meng, Xingcheng Zhang, Ke Liu:
An Ultralow-Ripple Polarization Voltage Generator based on High-Voltage Bandgap Reference for MEMS Gyroscopes. 197-200 - Yusufu Aishan, Yaxiaer Yalikun, Yo Tanaka:
Development of thin glass-based biconvex microlens fabrication technique via thermal expansion. 203-206 - Kexin Wang, Tengjing Hu, Yulong Zhao, Wei Ren:
Research on a MEMS Detonated Device with Built-in Safety and Arming Device. 215-219 - Yao Cai, Yunyi Huang, Guangyu Qin, Duli Yu, Xiaoxing Xing:
Flow-through Electroporation Using Silver-PDMS Based 3D Sidewall Microelectrodes. 228-231 - Zhen Wang, Renrong Zheng, Na Wang, Haisheng San:
Self-driven Photoelectrochemical UV-visible Photodetectors Using ZrO2@TiO2 Core-shell Nanorod Arrays Modified with Single-walled Carbon Nanotubes. 232-235 - Lingke Yu, Wenchang Tu, Lingling Liu, Shanshan You, Daoheng Sun:
Electronic Skin Based on Electrospun PVDF Nanofibers for Slipping Detection. 236-239 - Jia Xu, Jiahao Miao, Yi Liu, Yuan Tian, Xiaomei Yu:
A Simple Bandwidth Broadening Method of Terahertz Metamaterial Absorber by Partially Removing The Dielectric Layer. 242-245 - Fumikazu Mizutani, Michio Shimomura, Akinori Mori, Yoshikazu Yoshida, Yoshihiro Hosokawa, Tadao Matsunaga, Sang-Seok Lee:
Water Drop Detection Contained in Lubricant Oil for Submersible Pump Fault Diagnosis. 251-254 - Junjie Wu, Xiaoyu Cai, Yuan Li, Yunxia Fu, Jiasi Wei:
Lateral characteristic calibration of an atomic force microscope using a Cr atomic deposition grating. 255-258 - Huijun Yu, Peng Zhou, Wenjiang Shen:
Fast-scan MOEMS Mirror for HD Laser Projection Applications. 265-269 - Huiliang Liu, Yao Chu, Weiguo Hou, Yinqiao Li, Yuan Yao, Yaxing Cai:
Modeling and Optimization of VLF Piezoelectric Antenna Towards Lower Frequency. 271-274 - Yao Chen, Mingzhi Yu, Yintao Ma, Guoxi Luo, Zhuangde Jiang, Yu Bai, Libo Zhao:
Micro-fabricated alkali vapor cells for atomic spin gyroscope study. 282-285 - Yuanyuan Yang, Yajing Shen:
Graphene Oxide Nanosheet Assisted Porous Chitosan Sponge for Hemostatic Applications. 293-296 - Zichen Liu, Libo Zhao, Yihe Zhao, Jie Li, Zhikang Li, Yu Bai, Ping Yang, Qijing Lin, Zixuan Li, Jiawei Yuan, Zhuangde Jiang:
Design and Simulation of a Wide-Bandwidth CMUTs Array with Dual-Mixed radii and Multi Operating Modes. 299-302 - Zixuan Wu, Haojun Ding, Yaoming Wei, Kai Tao, Jin Wu:
Transparent, Anti-Freezing Hydrogels for Ultrasensitive Temperature and Strain Sensor Based on A Thin-Film Structure. 303-306 - Zheng Wang, Xingyin Xiong, Kunfeng Wang, WuHao Yang, ZhiTian Li, XuDong Zou:
Enhancing Sensitivity Using Electrostatic Spring in Coupling Mode-Localized Mems Accelerometer. 311-314 - Cuiwen Hu, Haifeng Chen, Deyun Mo, Haishan Lian, Yinhuan Yang, Xiaojun Chen:
Direct-write 3D printed self-supporting flexible microstructure devices. 319-323 - Chen Wu, Xudong Fang, Zhihong Feng, Qiang Kang, Yuanjie Lv, Yuefei Yan, Zhuangde Jiang:
Ohmic Contact Characteristics of Silicon Carbide-based MEMS Devices. 334-338 - Shulan Jiang, Yong Tan:
Facile fabrication of NiO wrinkle micro/nanostructures and the application of enzyme-free glucose sensors. 339-342 - Renrong Zheng, Zhen Wang, Na Wang, Zan Ding, Haisheng San:
High-efficient Electrochemical Betavoltaic Cell Using ZrO2 Modified TiO2 Nanorod Arrays. 345-348 - Yun Qi, Yuanyuan Yang, Wenjiang Shen:
Research on Key Technology of Novel RF MEMS Switch Designing and Fabricating. 358-363 - Yuanyi Fan, Ran Zhang, Ze Liu, Chuanlong Guan, Jinkui Chu:
Broadband linear-to-circular polarization converter based on ultrathin metal nano-grating *. 372-375 - Zhijian Liu, Jiaming Gao, Tianze Wu, Sen Wu, Zixiao Fan, Ziyi Yuan, Yongxin Song, Xinxiang Pan:
Probing zeta potential of glass in electrolyte solutions by colloidal probe technique. 378-381 - Li Zhang, Fei Xing:
High-Resolution Measurement Method Based on Array FOV and Coded Apertures. 382-385 - Xiaokang Yang, Xuefeng He, Zheng-guo Shang, Hui Huang, Chunlong Li, Yufei Liu:
Different Effects of Mass and Damping on Performance of Vibration and Wind Energy Harvesters. 386-389 - Shuyu Xiao, Jingfang Hu, Jiyang Wang, Yu Song, Yansheng Li, Guowei Gao, Lei Qin:
In-situ deposited ion-imprinted polymers for electrochemical detection of trace cadmium in water. 392-396 - Na Wang, Renrong Zheng, Zhen Wang, Jiang Chen, Haisheng San:
Electrochemical betavoltaic cell using black TiO2 nanotube arrays modified with single-walled carbon nanotubes. 399-402 - Lei Qian, Huijun Yu, Jie Hu, Wenjiang Shen:
Temperature Compensation for MOEMS Micromirror with Piezoresistive Angle Sensor. 407-411 - Feng Jiang, Wen Zhang, Yu Wei:
Nanocrystalline Composed SnO2 Inverse Opal for Highly Sensitive Acetone Gas Sensor at ppb-level. 412-416 - Jinming Zhang, Jing Zhang, Yanrong Wang, Md. Rasadujjaman, Shuhua Wei, Jiang Yan:
Study of the light emission from Eu3+ doped nanoporous organosilicate films. 417-420 - Nouha Alcheikh, Sofiane Ben Mbarek, Mohammad I. Younis:
Highly Sensitive Resonant Bi-Directional Magnetic Field Micro-Sensor. 425-428 - Yi-Hang Xin, Kai-Ming Hu, Xiu-Yuan Li, Er-Qi Tu, Wenming Zhang:
A Flexible Mechanical Composite Micro-Grating Tailored By One-Dimensional Ordered Wrinkle Patterns. 433-436 - Dong Wu, Dapeng Zhang, Mingwei Liu, Yongjun Lei:
Vibration Characteristics of Piezoelectric Timoshenko Nanobeam in Viscoelastic Medium*. 437-442 - Weilong Han, Jian Wen, Yifei Wu, Bo Niu, Yi Wu, Mingzhe Rong:
AC & DC Magnetic Field Sensor Based on Flexible Piezoelectric Polymer. 443-447 - Zeji Chen, Qianqian Jia, Wenli Liu, Yinfang Zhu, Quan Yuan, Jinling Yang, Fuhua Yang:
A Capacitively Transduced Bulk Acoustic Wave MEMS Resonator with Low Bias Voltages. 455-458 - Chaoming Gu, Zhoubin Yu, Xiaojie Li, Xin Zhu, Zhen Cao, Zhi Ye, Chuanghong Jin, Yang Liu:
Detection of Single Protein Molecules Using MoS2 Nanopores of Various Sizes. 459-462 - Hanyong Dong, Jintao Pang, Dongsheng Li, Qian Zhang, Jin Xie:
Humidity Sensor Based on Thin-Film Piezoelectric-on-Substrate Resonator and MoS2 for Multifunctional Applications. 463-466 - Dawei Wang, Chennan Lu, Xiaohong Wang, Wei Rao:
In-situ synthesized liquid metal microgels. 469-473 - Bo Zhang, Yong Jiang, Yang Li, Xiaoli Chen, Xiaolong Wen:
Design and Development of High Precision Magnetic Encoder Based on TMR MEMS Device. 474-479 - Yifang Liu, Ruimin Liu, Gang Fu, Xin Yan, Junyu Chen, Gaofeng Zheng:
Frequency Matching System of MEMS Gyroscope Based on Fuzzy Control Strategy. 491-495 - Xiao Wang, Mengjie Wang, Min Liu, Yue Liu, Weidong Wang:
Atomic study on the deform mechanism of CuTa/Cu and CuTa/Ta nanolaminates. 498-502 - Shuang Huang, Cheng Yang, Ziqi Liu, Xinshuo Huang, Hui-Jiuan Chen:
Wireless Implantable Phototherapy Device for Oral Inflammation Repair. 503-506 - Ziqi Liu, Keer Li, Shuang Huang, Xinshuo Huang, Lingfei Zhou, Tiancheng Sun, Hui-Jiuan Chen:
Multiparametric Flexible Sensor Arrays System for in situ Immediate Diagnosis of Glossitis. 509-512 - Lu Wang, Libo Zhao, Zhuangde Jiang, Xiang Li, Ping Yang, Yu Bai, Guoxi Luo, Qijing Lin, Ryutaro Maeda:
Contribution discrimination of auxetic cantilever for increased piezoelectric output in vibration energy harvesting. 513-517 - Wei Zhang, Jiachen Li, Huicong Liu, Guoqing Jin:
Research on Embedded 3D Printing for Magnetic Soft Robots. 518-523 - Yifan Zhao, Nan Wang, Fan Jiang:
Research on Coupling Mechanism of Wireless Power Supply Equipment for Film Pressure Wireless Sensing node of Water-lubricated bearing. 524-527 - Yongqi Cao, Dezhi Nie, Jian Zhang, Yiwei Wang, Ronggana He, Zhe Zhao, Jin Wu, Bowen Ji, Jianbing Xie, Kai Tao:
Investigation of electrostatic-piezoelectric hybrid vibrational power generators with different frequency broadening schemes. 528-532 - Yun Tian, Yongkang Wang, Yunfei Chen:
Size-Dependent Particle Separating in Curved Microfluidic Chip. 539-543 - Kenan Zhang, Guanzhou Lin, Jia Zhu, Yun Huang, Peimin Lu, Wengang Wu:
3D all-metal nano-cavity coupled metamaterial for refractive index sensing. 546-549 - Luming Wang, Zhimin Zhang, Ningning Luo, Haifeng Xiao, Long Ma, Qingwang Meng:
A Low-Cost Digital Lithography System Supporting Visual Focusing and its Application on Optical Fiber. 563-566 - Qingwang Meng, Zhimin Zhang, Ningning Luo, Luming Wang, Menghan Xiong:
Research on the resolution of submicron lithographic projection system based on DMD for optical fiber end face. 571-575 - Zebang Luo, Jing Chen, Zhengfang Zhu, Lin Li, Yi Su, Lei Wang, Hui Li:
Microstructural-PVDF Dielectric Layer Based High-Resolution Flexible Capacitive Pressure Sensor. 647-651 - Qilu Wang, Guannan Zhang, Hanyuan Zhang, Yongqing Duan, Yongan Huang:
Electrohydrodynamically Printed Multicolor Perovskite Image Sensor Array. 652-655 - Lei Wang, Wei Zhu, Zhipeng Wu, Wenjuan Liu, Chengliang Sun:
A Novel Piezoelectric Micromachined Ultrasonic Transducer with Adjustable Broad and Flat Frequency Band. 656-659 - Jiale Dong, Hao Wang, Xiu Xiao, Taili Du, Yunpeng Zhao, Zhongqi Fan, Minyi Xu:
Stackable Triboelectric Nanogenerators for Self-Powered Marine Monitoring Buoy. 660-664 - Youchao Huang, Shenhui Ma, Jiaona Zhang, Chao Xie, Min Zhang:
Modulating the Electrical Transport Characteristics of a Metal-Semiconductor-Metal Structure by Local Strain Gradient. 665-669 - Rong Wang, Cao Xia, Dong F. Wang, Takahito Ono:
A high-frequency narrow-band filtering mechanism based on auto-parametric internal resonance. 670-675 - Yi Yang, Yuelin Wang, Shixing Chen, Tie Li:
Calibrate Silicon Nanowires Field Effect Transistor Sensor with its Photoresponse. 676-679 - Yao Huang, Hainan Zhang, Guanhua Dun, Yuhua Li, Renrong Liang, Yi Yang, Dan Xie, He Tian, Tianling Ren:
Flexible and Transparent Ultraviolet Photodetector Enabled by Metal Doping ZnO Nanorods Based on Mica Substrate. 680-684 - Huimin Zhang, Yanlu Feng, Wei Zhang:
Design and Manufacture of a High Precision MEMS Flexible Force Sensor. 687-690 - Yiming Jin, Zhipeng Ma, Yixuan Guo, Tengfei Zhang, Xudong Zheng, Zhonghe Jin:
Linear stiffness tuning of MEMS triangular capacitors. 691-694 - Yulong Zhang, Zhuhao Gong, Huiliang Liu, Zewen Liu:
Power Handling Capability Enhanced RF MEMS Switch Using Modified-Width Cantilevers Structure. 695-698 - Shenghong Lei, Yun Cao, Weirong Nie, Zhanwen Xi, Na Xu, Weixiang Qiu:
Research on Motion Characteristics for Latching Mechanism of MEMS Safety and Arming Device under Dual Environmental Forces. 699-703 - Changhe Sun, Bolun Li, Wenqu Su, Yufei Liu, Yaming Wu:
Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle. 704-708 - Guoqiang Gu, Pengcheng Zhang, Hui Yang:
Photonic Nanojet Produced by A Microfluidic Channel for Biofluid Monitoring. 711-714 - Pengcheng Zhang, Bing Yan, Guoqiang Gu, Zitong Yu, Xi Chen, Zengbo Wang, Hui Yang:
Fluorescence Enhancement Utilizing Dielectric Microbeads with Semi-open Microwells. 715-718 - Guangyuan Xu, Yanan Chen, Fangshuai Chen, Yanfang Meng, Yinji Ma, Xue Feng:
Fabrication of laser scribed graphene stretchable supercapacitor by laser-assisted transfer printing strategy. 731-736 - Linhao Feng, Kai Huang, Mingxin Liu, Hongsheng Zhong, Xiaosheng Zhang:
Smart Power Management Microsystem for Distributed Renewable Energy Harvesting. 737-740 - Jianhao Liu, Changxin Liu, Cong Zhao, Huaan Li, Guanghao Qu, Zhuofan Mao, Zhenghui Zhou:
Design of Self-powered Environment Monitoring Sensor Based on TEG and TENG. 749-753 - Wenhao Pan, Shiyi Xu, Xiyu Mao, Tianyu Li, Qingpeng Cao, Xuesong Ye, Bo Liang:
An Integrated Stretchable Sensing Patch for Simultaneously Monitoring of Physiological and Biochemical Parameters. 762-767 - Guochang Liu, Wenping Cao, Haoyu Tan, Renxin Wang, Wendong Zhang:
Modeling and Simulation of Flexible Vector Shear Flow Sensor Based on COMSOL Multiphysics. 770-774 - Yucai Xie, Hongpeng Zhang, Haotian Shi, Yuwei Zhang:
Frequency Research of Microfluidic Wear Debris Detection Chip Based on Inductive Wheatstone Bridge. 780-785 - Rencheng Zhuang, Dekai Zhou, Xiaocong Chang, Longqiu Li:
Simulation of the Shape-directed AC Driven Defective Micromotors*. 798-803 - Zhongbao Wang, Yigen Wu, Dezhi Wu, Zhenyin Hai:
3D printing of magnetically actuated miniature soft robots. 804-808 - Wei Wang, Yanbo Xie, Antoine Riaud:
Anisotropic spreading of droplets on striped electrodes. 809-812 - Hadi Tavakkoli, Izhar, Xu Zhao, Yi-Kuen Lee:
Low-cost Micro Search-Coil Magnetic Sensor with Self Calibration for the Internet of Things. 813-817 - Gaoqiang Niu, Changhui Zhao, Fei Wang:
Scalable Synthesis of SnO2 Nanosheet Arrays on Chips for Ultralow Concentration NO2 Detection. 820-823 - Bian Tian, Bingfei Zhang, Zhongkai Zhang, Zhaojun Liu, Jiangjiang Liu, Gong Cheng, Qijing Lin, Chen Wu, Peng Shi, Zhuangde Jiang:
A Tungsten-Rhenium Thin Film Thermocouples Sensor Based on AlN Transition Layer. 826-829 - Shuang Ma, Wenxue Wang, Yuechao Wang, Lianqing Liu, Tianlu Wang:
A New Method for Characterization of Single Cell Using System Identification. 832-837 - Lingyun Wang, Daner Chen, Heng Xiong, Yifang Liu:
Design and Optimization of Glass Frit Package Structure for Micro Pressure Switch. 840-844 - Chenglong Liu, Qi Li, Qianhuang Chen, Yan Xing:
Damage profile model of nanostructure fabricated by Focused Helium Ion Beam. 845-848 - Huiyao Shi, Jialin Shi, Peng Yu, Lianqin Liu:
Investigation of Broading Modulus Range of Soft Probes by Single-beam Acoustic tweezer. 849-852 - Menghan Xiong, Ningning Luo, Zhimin Zhang, Qingwang Meng:
Factors Influencing Resolution of Optical Fiber End Face Processing in Digital Lithography. 864-869 - Guang-Hui Ding, Binghe Ma, Yu-Chao Yan, Weizheng Yuan, Jinjun Deng, Jian Luo:
Through Glass Vias by Wet-etching Process in 49% HF Solution Using an AZ4620 Enhanced Cr/Au Mask. 872-875 - Ye Chen, Jin Qian, Xinyan Guo, Yan Xing:
An adaptive octree level set simulation method of the wet etching process for the fabrication of micro structure on sapphire crystal. 882-886 - Guanzhou Lin, Kenan Zhang, Yun Huang, Shengxiao Jin, Tian Kang, Yusa Chen, Liye Li, Peimin Lu, Wengang Wu:
A Flexible AgNPs-PDMS Substrate to Produce Ultrasensitive SERS Detection. 889-892 - Yinghao He, Yaoping Liu, Wei Wang, Yufeng Jin:
A clogging rate prediction model based on porous microarray membranes for liquid biopsies. 898-901 - Weijie Bao, Shengnan Sun, Zhihai Wang, Yaohong Wang:
Micro-droplet of Particulate Suspension Generated by a Pneumatic Ejection System. 904-908 - Jiaqiang Wang, Liguo Chen, Xiongheng Bian, Zaichen Wang:
Tweezers for Micro-droplet Transfer Based on Hydrophobic Nonparallel Plate Structure. 909-914 - Xiaodong Zhao, Yanlu Feng, Wei Zhang, Jianhui Liao:
Design and Preparation of a High Resolution Accelerometer Based on Graphene. 915-918 - Mei Liu, Aristide Djoulde, Quan Yang, Weilin Su, Lingli Kong, Jinjun Rao, Jinbo Chen, Zhiming Wang:
Nanorobotic Manipulation inside Scanning Electron Microscope for the Electrical and Mechanical Characterization of ZnO nanowires. 919-924 - Xiyu Gu, Jieyu Liu, Yao Cai, Yan Liu, Chao Gao, Zhiwei Wen, Shishang Guo, Chengliang Sun:
Laterally-excited bulk-wave resonators (XBARs) with embedded electrodes in 149.5° Z-cut LiNbO3. 931-934 - Bo He, Wen-Zhong Lou, Heng-Zhen Feng, Yue-Cen Zhao,