"Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static ..."

Changhe Sun et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451305

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Changhe Sun, Bolun Li, Wenqu Su, Yufei Liu, Yaming Wu:
Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle. NEMS 2021: 704-708

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