"AlN Contour Mode Resonators with Half Circle Shaped Reflectors."

Zhifang Luo, Shuai Shao, Tao Wu (2021)

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DOI: 10.1109/NEMS51815.2021.9451471

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Zhifang Luo, Shuai Shao, Tao Wu:
AlN Contour Mode Resonators with Half Circle Shaped Reflectors. NEMS 2021: 1255-1258

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