"The Influence of Electrode on Elastic Constant $C_{33}{}^{D}$ Extraction ..."

Xia Hu, Ouyang Su, Lifeng Qin (2021)

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DOI: 10.1109/NEMS51815.2021.9451302

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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  - https://dblp.org/rec/conf/nems/HuSQ21
Xia Hu, Ouyang Su, Lifeng Qin:
The Influence of Electrode on Elastic Constant $C_{33}{}^{D}$ Extraction of Scandium-doped Aluminum Nitride Thin Film by Thickness-extensional Mode FBAR. NEMS 2021: 1718-1722

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