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"The Influence of Electrode on Elastic Constant $C_{33}{}^{D}$ Extraction ..."
Xia Hu, Ouyang Su, Lifeng Qin (2021)
- Xia Hu, Ouyang Su, Lifeng Qin:
The Influence of Electrode on Elastic Constant $C_{33}{}^{D}$ Extraction of Scandium-doped Aluminum Nitride Thin Film by Thickness-extensional Mode FBAR. NEMS 2021: 1718-1722
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