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"SF6 plasma etching and profile evolution of silicon in microplasma reactor."

Wang Hai et al. (2013)

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DOI: 10.1109/NEMS.2013.6559936

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/nems/HaiHXZL13
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  - https://dblp.org/rec/conf/nems/HaiHXZL13
Wang Hai, Li Han, Zhou Xuan, Wang Zhan, Wen Li:
SF6 plasma etching and profile evolution of silicon in microplasma reactor. NEMS 2013: 1210-1213

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