BibTeX record conf/nems/HaiHXZL13

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@inproceedings{DBLP:conf/nems/HaiHXZL13,
  author    = {Wang Hai and
               Li Han and
               Zhou Xuan and
               Wang Zhan and
               Wen Li},
  title     = {{SF6} plasma etching and profile evolution of silicon in microplasma
               reactor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1210--1213},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559936},
  doi       = {10.1109/NEMS.2013.6559936},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HaiHXZL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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